Brooke's SEM PicoDenter series is a deep sensing nanomechanical testing system specifically designed for use with the superior imaging capabilities of scanning electron microscopes (SEM, FIB/SEM). With these systems, quantitative nanomechanical testing can be conducted while using SEM for imaging. Hysitron PI 85L SEM PicoDenter is a specialized in-situ nanomechanical testing instrument designed specifically for SEM use, but also suitable for various platforms and environments. The instrument uses Brooke capacitive sensors in conjunction with an extremely fast 78 kHz control system to provide * * performance and stability at the nanoscale. The compact and small-sized design makes the system very suitable for cavities, Raman and optical microscopes, synchrotron radiation beamlines, and more.

Specially designed for high performance and versatility

The sample stage design of Hysitron PI 85L can accommodate samples with a thickness of up to 10 mm, while providing * * sample positioning in three directions (XYZ) within a range of 3 mm. In addition, the mechanical coupling between the sample and the sensor provides a stable and rigid platform for nanomechanical testing. In summary, this design can achieve maximum tilt and minimum working distance, resulting in optimal imaging performance during testing.

In situ mechanical data synchronized with SEM imaging

The in-situ mechanical data collected using Hysitron PI 85L were synchronized with SEM imaging and displayed side by side. In the example on the left, the discontinuity in the load displacement data is related to the fracture observed in materials containing copper interconnects and brittle dielectrics. Simultaneously conducting mechanical measurements and SEM imaging can * * understand the deformation behavior of materials.

**Exploring material deformation behavior using various modes

The Hysitron PI 85L can be used in various modes to test basic mechanical properties, stress-strain behavior, stiffness, fracture toughness, and deformation mechanism in different samples.

In addition to the standard testing mode, the PI 85L can also be upgraded and its functionality can be further expanded using optional modes. From heating options to electrical characteristics, the PI 85L can be adjusted according to your needs.